https://www.mst.or.jp/method/tabid/136/Default.aspx
Features
TDS is a mass spectrometry method that can monitor gases generated by vacuum heating/temperature elevation at different temperatures.
In a TDS spectrum, the horizontal axis represents temperature and the vertical axis represents ion intensity. This makes it possible to compare the amount of desorbed gas released and the desorption temperature. Furthermore, since it is under a vacuum atmosphere, hydrogen and water can also be analyzed with high sensitivity.
It is possible to know the relationship between the gas and pressure desorbed from the sample and the temperature at which it occurs.
Because only the sample can be heated, the background is low and high-sensitivity analysis of low-mass molecules such as hydrogen, water, oxygen, and nitrogen is possible.
Estimation of components of gas generated from samples and quantitative analysis (number of molecules) possibleApplication example
Evaluation of organic and inorganic contamination on wafer surfaces (Si substrates, glass substrates, SiC substrates, etc.)
Moisture evaluation in thin films (oxide film, nitride film, metal film, resist film, etc.)
Investigation of residual film-forming gas (due to film-forming materials, film-forming environment, etc.)
Investigation of residues from cleaning, etching, etc.
Investigating the cause of abnormalities such as membrane peeling and blistering
Annealing temperature evaluation of organic film
Investigation of degassing from various materials such as packages and adhesives
H2 desorption etc.